[mems-talk] metal etching with the thickness > 30 um

Feng-Yuan Zhang fyzhang at UDel.Edu
Tue Sep 5 13:22:45 EDT 2006

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Dear all,

I would like to get masked pattern on the substrates with Ti, Cu, or 
stainless steel. Can these metals be etched with the thickness > 30 
um in DRIE process.Any comments and reference are greatly appreciated.

Have a nice day,

Fengyuan Zhang

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