[mems-talk] Washing-away problem in non-conductive substrate EBL

Hongjun-ECE hzeng at ece.uic.edu
Wed Sep 6 10:29:08 EDT 2006

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Hi Michael,

Thanks for your suggestion. I will dip an uncoated PMMA sample to the
etchant and see what is going to happen...

Hongjun

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