[mems-talk] Generating Small capacitances for measurement

[Andrew O'Grady]

Hello,

We are attempting to build a circuit to measure differential capacitance of
~1fF for our MEMS sensors.  However, our sensors are not yet ready, and we
want to calibrate our circuit on something with a known changing
capacitance.  Does anyone know of something that we could purchase , such as
an accelerometer or micromirror, where the capacitance values are given?  It
would be even better if the capacitance change responded to a voltage, so we
could test out our closed-loop feedback system.

Thanks,
Andrew O'Grady

Columbia University
Mechanical Engineering Dpet.
amo2109 at columbia.edu