[mems-talk] Adhesive layer for gold on oxide and patterning

[J.J HU]

Hi all,
I am trying to put down 300~500nm Au film on Si dioxide as electrodes, and I
am just wondering what kind of adhesive layer (needs to be electrically
conductive) should I deposit before Au to improve the adhesion?

And anyone has some good thoughts about how to pattern the gold electrode
(as well as the adhensive layer)? Will regular lift-off work?

Thanks much,
JJ Hu