[mems-talk] HF resistance materials that have conductivity

[Shay Kaplan]

You can try to evap Cr-Cu

shay 

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Jeehwan Kim
Sent: Wednesday, September 06, 2006 8:40 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] HF resistance materials that have conductivity

Dear all,

I am fabricating micro-porous Si through anodization from the back side of
wafer using HF-ethanol solution. The front surface becomes very rough after
anodization. I need to protect this surface by depositing or spin coating
something. The condition for protection layer is conductive and resistant to
HF solution. Please let me know if you have any idea about these protection
materials.