[mems-talk] device passivation layer

Viswanadam, Gautham gautham.viswanadam at schott.com
Sun Sep 10 22:00:13 EDT 2006


A thin layer (2000 A) of Alumina film (Al2O3) deposition should work for 
your scanning evaluations.
Alumina is very hard and also transparent when deposited thin. Best 
Regards, Gautham


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