[mems-talk] about AZ P4620

[Crystalmems]

Hi all,

I am working on some round channels with photoresist
AZ P 4620. I got a problem with reflow process. I
normally do 4min at 125C for reflow, it works
sometimes and most of time, it can not totally reflow,
only the edge reflowable and the middle of the channel
doesn't work? I am wondering whether 4min is too
short? Anyone has experience with this kind of
photoresist? Thank you very much. Please reply to my
email. Thanks.

echo