[mems-talk] boron membrane on Si-Wafer

sebastian wicklein bastiwicklein at aol.com
Mon Sep 11 15:06:16 EDT 2006


Hello,

I need Silicon wafers with a p++ doped membrane of 3-4um thickness (minimum:
10to20 atoms/cm cubic)

Is anybody able to produce such membranes?

Let me know


Cheers
Sebastian


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