[mems-talk] Wet etching of Quartz wafer

[Jesse D Fowler]

Hello Lin,

If it's just fused quartz, it should be etching WAY faster than it is. 
Something's coating it, or something's wrong with you HF.

If you're trying to etch single-crystal quartz, a little heat will go a 
long way. Dr. Hiroshi Yoshi wrote a paper about etching single-crystal 
quartz about 6 years ago. If I remember correctly, he was using BOE heated 
in a boiling water bath.

Be careful with this stuff. I inquired with my lab manager about doing 
this with concentrated HF, and he told me no way without a teflon coated 
reflux ($5000 at the time). 

Hope this helps,
Jesse Fowler


"Lin Yu" <yulin7839 at gmail.com> 
Sent by: mems-talk-bounces at memsnet.org 09/09/2006 15:11
To <mems-talk at memsnet.org>
Subject [mems-talk] Wet etching of Quartz wafer


Hello,

I've been trying to etch quartz wafer using HF or BHF. But the ethcing 
rate
was really slow, 1000A in 2 hours. Does anyone know a stable and repid 
way to etch quartz?