[mems-talk] HF resistance materials that have conductivity

[Kirt Williams]

Take a look at "Etch Rates for Micromaching Processing, Part II" and pick a 
metal that doesn't etch in HF and has good adhesion.
Chromium or niobium are two options.

    --Kirt Williams

----- Original Message ----- 
From: "Jeehwan Kim" <jhkim03 at ucla.edu>
To: <mems-talk at memsnet.org>
Sent: Wednesday, September 06, 2006 11:39 AM
Subject: [mems-talk] HF resistance materials that have conductivity


> Dear all,
>
> I am fabricating micro-porous Si through anodization from the back side of
> wafer using HF-ethanol solution. The front surface becomes very rough 
> after
> anodization. I need to protect this surface by depositing or spin coating
> something. The condition for protection layer is conductive and resistant 
> to
> HF solution. Please let me know if you have any idea about these 
> protection
> materials.