[mems-talk] Wet etching of Quartz wafer

[Jesse D Fowler]

Excuse me, I made a mistake. It's actually  Dr. Hiroshi Toshiyoshi.

Jesse Fowler

>From Jesse D Fowler <Jesse.D.Fowler at aero.org> 
Sent by: mems-talk-bounces at memsnet.org 09/11/2006 17:10
To General MEMS discussion <mems-talk at memsnet.org>
Subject Re: [mems-talk] Wet etching of Quartz wafer


Hello Lin,

If it's just fused quartz, it should be etching WAY faster than it is. 
Something's coating it, or something's wrong with you HF.

If you're trying to etch single-crystal quartz, a little heat will go a 
long way. Dr. Hiroshi Yoshi wrote a paper about etching single-crystal 
quartz about 6 years ago. If I remember correctly, he was using BOE heated 
in a boiling water bath.

Be careful with this stuff. I inquired with my lab manager about doing 
this with concentrated HF, and he told me no way without a teflon coated 
reflux ($5000 at the time).