[mems-talk] boron doped Silicon

[sebastian wicklein]

Hello all,

Since I need boron doped silicon membrane with a thickness of 3-4 µm on a
silicon wafer and a boron concentration of 1020 atoms/cm3 over the whole
thickness I’m looking for someone who can help me with that matter.

Either a Supplier or someone who is able to deposit via CVD such a layer on
a Silicon wafer would be fine.

I would really appreciate every hint.

 

Thank you!

 

Regards,

 

Sebastian Wicklein