[mems-talk] germanium wet isotropic etch

Andrea Mazzolari info at alientech.it
Wed Sep 13 15:25:49 EDT 2006


Hi all,
i'm looking for informations about wet isotropic etch of germanium.
Until now i've found only this article: "anisotropic etching of  
germanium", sensors and actuators A 46-47 (1995) 35-37
but it's mainly dedicated to anisotropic etch!

Can someone suggest me some article or a solution ?

Thanks
Andrea



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