[mems-talk] A Queston about How to Deposit SiCr

[J.J wang]

Dear MEMS-Talk Members

Currently I am trying to grow SiCr on my samples. I read some articles about using sputtering technique for the deposition. Does anyone have the experience of growing SiCr such as:

1) Which vendors have SiCr sputtering target for sale ?
2) What is the sputtering parameters like gas flow rate, pressure, growing rate...

If someone has other methods rather than sputtering technique, I will be fine with it. I am open to any methods.

The reason I am using SiCr is because of its resistivity which is about 700. If any one knows some other material that have similar resistivity, I am Ok with that as well

Any suggestions will be welcom. Thanks very much for your help

J.J. Wang