[mems-talk] How to deposit reliable amorphous C film?

[Darius]

Dear all,

I need an idea about deposition of smooth C film over the dielectric (say,
glass) substrate. We are trying to do the e-beam evaporation of graphite,
but can not get reliable adhesion (the result is a kind of smoked glass).

Can anyone advise about the conventional deposition technique for this?

Or give a clue about the adhesion improvement (substrate temperature, etc.)
during e-beam procedure?

Thanks

Darius