[mems-talk] Gold etching problem

[Sarah McQuaide]

Anyone who can help me with the following question would be greatly 
appreciated-

I make small wells in boro glass with raised lips around the edges using 
a gold/cr mask. When I try to do my final gold/chrome etch to get it all 
the metal off, some metal still hangs on to the edges of the wells or 
around the lips. I've tried sonicating 1 hr + in gold/chrome etch but 
it's not seeming to do the trick...anyone know how to comabt what I 
believe is a surface tension issue?

thank you very much,
Sarah McQuaide
Research Engineer
University of Washington