[mems-talk] PDMS bond to silicon nitride

Cheng Ming Lin r90543018 at ntu.edu.tw
Tue Sep 19 04:04:32 EDT 2006

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Hi all,
 
Does PDMS bond to silicon nitride? I try plasma treatment to promote
bonding? 
Does anyone has solution to deal with it?  Thanks.
 
 
C.M.

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