[mems-talk] crucible material for evaporating Al

Bin Liu b.liu at duke.edu
Thu Sep 21 10:40:14 EDT 2006


try copper?

luhao wrote:
> Hi all,
>
> What's the best material of crucible for evaporating Al?  I used 
> graphite crucible and always end up with broken crucible.

Bin Liu
PhD Candidate
Electrical and Computer Engineer Department
Duke University
3583 FCIEMAS
Box 90291
Durham, NC 27708
Tel: (919)660-5567
Fax: (919)660-5293
Email:b.liu at duke.edu



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