[mems-talk] crucible material for evaporating Al

[Shay Kaplan]

You can evap directly from the copper hearth or use BN crucible

Shay 

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of luhao
Sent: Thursday, September 21, 2006 12:35 AM
To: mems-talk at memsnet.org
Subject: [mems-talk] crucible material for evaporating Al

Hi all,

What's the best material of crucible for evaporating Al?  I used graphite
crucible and always end up with broken crucible.