[mems-talk] Re: Problems with my Ti/Au wet etching process

[Brad Cantos]

Yes, this is a very strong GaAs etchant.
Brad

On 9/26/06 7:02 AM, "ahajjiah at vt.edu" <ahajjiah at vt.edu> wrote:

> Vinay,
> Does this etch etch thourgh GaAs or AlGaAs?
> Ali
> 
> 
> Quoting Vinay <vinay.kv at gmail.com>:
> 
>> Hi Ali,
>> One possible recipe to etch Ti is:
>> 20H2O(DI) : 1HF : 1H2O2.