[mems-talk] photoresist multiple coating

[Abhishek Jain]

Hi
I want to do multiple coatings(2-3) of resist AZ4620 or a similar
positive resist (not SU-8) to get thicknesses of 50-75um. I am looking
for a recipe to do this. Please advice if you have any experience.

Thanks
-Abhishek Jain

-- 
Research Assistant
Microfluidics Lab (Prof. J.D. Posner)
Department of Mechanical & Aerospace Engineering
Arizona State University
Tempe, Arizona 85281
Ph:480 727 9157
Fax: 480 965 1384
www.public.asu.edu/~ajain29