[mems-talk] Creating photomasks using PC printers

Darius darius.virzonis at ktu.lt
Thu Sep 28 01:50:59 EDT 2006


Brian,
It depends on what feature size do you want to produce with this photomask.
On my experience, this is suitable only to relatively low resolution
photolitography (~500 um), and anly ink printers can principally suit. If
you want cheap and rapid photomask, call to the nearest printing-house,
which employ the offset printing. They can easily convert any PC-made
drawing to the transperency that will give the resolution of at least 20 um.
If you need more resolution, do not play with the transperencies and PC
printers. That will not help.

Good luck.

Darius

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of bdaly at evapcoat.com
Sent: Wednesday, September 27, 2006 9:33 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] Creating photomasks using PC printers

I would like to create photomasks from a PC printer (either inkjet or laser)

and appropriate transparent media. I need a resolution on the order of .001 
inch (25 micrometers).
 
I have seen on the web a mix of products and technology articles, but none
are 
clear on a working combination of printer (type or model), required printer 
resolution (DPI), ink, and transparency media. I've seen comments that even 
1200 dpi resolution is not adequate to produce a continuous "black" mask of 
sufficient density to adequately block the UV used in the photoresist
exposure.
 
Can you suggest a printer, ink and transparency media that has worked for
you, or direct me to a source for that information?


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