[mems-talk] Gold protection during long TMAH etching

[Martyna Grydlik]

Hello,

Does anybody know any product (polymer, photoresist, protective coating)
that could protect my metal contacts (Au/Al) while long time Si etching
of the backside? For etching I use TMAH at 80°C.  I tried already
several products including BCB, SU8, ProTek etc., but all of them simply
peel off from Au surface. I would appreciate any hint or suggestion.

Martyna Grydlik