[mems-talk] Photoresist with smooth and high resolution sidewall

[Isaac Chan]

Alton,

Are you talking about the ripples on the sidewall caused by standing wave
interference pattern, or the line edge roughness seen from the top due to
the resist's molecular roughing/photomask pattern roughness?

Regards,
Isaac


On Fri, 29 Sep 2006, Hsiu-Jen Wang wrote:

> Hi,
>
>    "high resolution sidewall" means the roughness of the surface of
> the sidewall is in sub-micron, even down-scale to sub-100nm.
>
> Alton Wang
> University of Washington
>
>
> On 9/29/06, Roger Shile <rshile at nanoink.net> wrote:
> > Pray tell what is a "high resolution sidewall"?