[mems-talk] Polysilicon Deposition

David Thomson d.thomson at surrey.ac.uk
Sun Apr 1 18:33:53 EDT 2007


Hi,

I need to get 4um of polysilicon deposited onto inch square SOI  
samples. I know that 4um is quite a lot to deposit so I am  
considering sputtering silicon on and then annealing to form the  
poly. Does anyone know of anywhere that can perform this task.

Cheers,

Dave


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