[mems-talk] RIE etching

mohammed ashraf ashraf161179 at hotmail.com
Wed Apr 4 01:59:24 EDT 2007

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Dear all

I need to etch AZ9260 structures which are on SU8 substrate. Can anyone 
suggest me a way to etch AZ9260 resist without affecting/etching SU8 in any 
way ?

Regards

Ashraf

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