[mems-talk] Removing PDMS from SIO2

[Xiaoguang "Leo" Liu]

Hi Petru

PDMS is pretty hard to remove once "hard" bonded to SiO2. You can try
to use a blade or your tweezers to rip off the majority of the PDMS
and try HCL:HNO3 3:1 to remove the residual. It worked for me once.

Best
Leo

On 4/4/07, Petru Lunca Popa <petrulp at gmail.com> wrote:
> Hi
> I sticked some PDMS on a SIO2. Doesa anybody has any iddea how to remove it?
> I tried with Chloroform and THF and didnt work. I dont want to polish
> or do something which can possible destroy the Si oxide layer
>