[mems-talk] Removing PDMS from SIO2

[Petru Lunca Popa]

Thanks a lot. I will try and I will tell you what happened. I have to
be careful do not remove the gold from my Si

On 4/4/07, Xiaoguang Leo Liu <liuxiaoguang at gmail.com> wrote:
> Hi Petru
>
> PDMS is pretty hard to remove once "hard" bonded to SiO2. You can try
> to use a blade or your tweezers to rip off the majority of the PDMS
> and try HCL:HNO3 3:1 to remove the residual. It worked for me once.