[mems-talk] Organic residue etching

[Sreemanth M Uppuluri]

Hello All,

I am working with Chromium/Aluminum/Chromium coated quartz substrates and I 
am trying to etch some organic residues sticking to the top chromium film. I 
have seen in the literature that Piranha or RCA are recommended for organic 
residue etching. I am wondering if these solutions are going to affect the 
underlying metal films as well (which I definitely do not want to happen). 
Please let me know if you have any suggestions.

Thanks,
Sreemanth