[mems-talk] Removing PDMS from SIO2

[Xiaoguang "Leo" Liu]

Hi Petru
I didn't know you had Au on your wafer. I think the HCL:HNO3 will
remove attach Au....
Best
Leo

On 4/4/07, Petru Lunca Popa <petrulp at gmail.com> wrote:
> Thanks a lot. I will try and I will tell you what happened. I have to
> be careful do not remove the gold from my Si
>
> On 4/4/07, Xiaoguang Leo Liu <liuxiaoguang at gmail.com> wrote:
> > Hi Petru
> >
> > PDMS is pretty hard to remove once "hard" bonded to SiO2. You can try
> > to use a blade or your tweezers to rip off the majority of the PDMS
> > and try HCL:HNO3 3:1 to remove the residual. It worked for me once.

-- 
Xiaoguang "Leo" Liu
Electrical and Computer Engineering
Purdue University
liu79 at purdue.edu