[mems-talk] Organic residue etching

[bobhendu at aol.com]

Sreemanth:
 
Typically a Piranha clean will not damage Chromium but if you have pinholes it will attach the aluminum underneath quite drastically. To be safe you might want to try removal in a downstream plasma ash system using oxygen/nitrogen. This should not damage either film and should do a good job removing organics from the surface. Bob Henderson 
 
-----Original Message-----
From: sreemanth at hotmail.com
To: mems-talk at memsnet.org
Sent: Wed, 4 Apr 2007 2:27 PM
Subject: [mems-talk] Organic residue etching

Hello All, 
 
I am working with Chromium/Aluminum/Chromium coated quartz substrates and I am trying to etch some organic residues sticking to the top chromium film. I have seen in the literature that Piranha or RCA are recommended for organic residue etching. I am wondering if these solutions are going to affect the underlying metal films as well (which I definitely do not want to happen). Please let me know if you have any suggestions.