[mems-talk] Adhesions between interfaces of: SU8 on parylene on silicon

[Yu, Zeta (Tak For)]

Dear MEMS Fellows,
 
I deposited >100um SU8 on 6um parylene on a silicon wafer. After the 
process, I found that the adhesions between SU8 / parylene and parylene 
/ Si are not as good as expected. SU8 can be peeled off from parylene 
easily, as compared to SU8 / Si. And parylene film underneath SU8 
pattern does not attach to Si anymore (perhaps stress from SU8 stretch 
the parylene from conforming Si).
 
Would you mind to share the promoters and the processes /references that 
promote these 2 interfaces so that I can have a better start? I searched 
through google / mems-exchange, yet could not find much relevant 
information. Thanks,
 
Tak