[mems-talk] PMMA and LOR (PMGI) intermixing question

Chris Park cpark at nitronex.com
Tue Apr 10 12:32:34 EDT 2007


HI All
If I have a patterned PMMA on the wafer and wants to put PMGI or LOR
from MicroChem on the PMMA and bake, would it modify the patterns on
PMMA or cause the interfacial scums between PMMA and PMGI?
Thanks you in advance
Chris Park



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