[mems-talk] Chemical Mechanical Polishing

[Sreemanth M Uppuluri]

Hello All,

I am trying to perform Chemical Mechanical polishing (CMP) of Aluminum thin 
films coated on quartz substrates to make the Aluminum film smooth. I found 
that this has been done by others in the past. I am wondering what the 
maximum smoothness from this process is? I need a roughness of less than 10 
nm. Please let me know if anyone has experience in this area.

Thanks,
Sreemanth