[mems-talk] AZ5214E conditions

Yue Mun Pun, Jeffrey g0500396 at nus.edu.sg
Wed Apr 11 02:47:09 EDT 2007


Hi,
Can anyone tell me what is the typical processing conditions for processing AZ5214E when it is spun coated at 4000rpm in terms of the exposure dose to be used as well as the developer time if AZ Developer is used?
 
Jeffrey


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