[mems-talk] Stiction problems in SU-8 cantilever

[Yue Mun Pun, Jeffrey]

Hi,
I would like to know if anyone has faced any stiction problems of a SU-8 cantilever released from a 100nm Chromium film via Chromium etch, with the substrate being also SU-8?  My thought is that since SU-8 is hydrophobic, there should be much of a stiction problem if both the cantilever and the substrate are made of SU-8, even though the space between them is 100nm, right?
 
Jeffrrey