[mems-talk] Stiction problems in SU-8 cantilever

[nate lipkowitz]

hi,

my guess is that at 100nm separation van der waals forces are not  
insignificant (or i think, strictly speaking, the "retarded van der  
waals" or casimir force).  i would think about the magnitude of the  
force involved vs. the spring constant of the cantilever.

see this paper for example:

http://www.nature.com/nmat/journal/v4/n8/full/nmat1431.html

nate

"Yue Mun Pun, Jeffrey" <g0500396 at nus.edu.sg> wrote:

> Hi,
> I would like to know if anyone has faced any stiction problems of a   
> SU-8 cantilever released from a 100nm Chromium film via Chromium   
> etch, with the substrate being also SU-8?  My thought is that since   
> SU-8 is hydrophobic, there should be much of a stiction problem if   
> both the cantilever and the substrate are made of SU-8, even though   
> the space between them is 100nm, right?

nate lipkowitz
416 823 8057
nlipkowi at chem.utoronto.ca