[mems-talk] How to remove extra carbon nanotube?

[Lin Yu]

Hi everyone,

I have CNT sample with CNT covered everywhere on the substrate. 
Right now I want to pattern it and etch the undesired CNT. I tried to
use photoresist to cover the desired region and do plasma etching to 
remove extra CNTs. But the problem was I found it difficult to remove
PR after plasma etching. Does anyone have any idea or experience to
remove CNT? Any suggestion will be appreciated. 

Thanks,
Lin Yu