[mems-talk] Difference between PR developers AZ 326 and AZ 726

[saravan kallempudi]

Hello,

I would like to know the difference between the PR developers AZ 326 and AZ 726.
I tried Image reversal using AZ 5214, the conditions are 4000rpm/40sec. soft bake at 95 degree for 95 sec, expose for 35 sec and then baked it for 3 minutes at 105 degree, then flooding it for 35 sec.

we didnt have AZ 326 in my lab so I used AZ 726 for 60 seconds as developer and after  I  rinsed it  with water, I found that all PR is coming off. It is not sticking to the glass wafer.

Can anyone help me out with this?

Saravan