[mems-talk] silicon rich nitride wet etch

[Ciro Chiappini]

Hi

I have to etch a 2000Ã… thick silicon rich nitride film under a photoresist
(AZ5209) mask. I need to get a nitride mask since the next step is
electrochemical etching in EToH:HF 3:7. I am currently RIE etching it, but
the process is very time consuming.

I tried wet etch both HF:H2O 1:10 AND HF:HCL 1:1 but the resist gets peeled
off in few minutes.

Do you have any alternative recipe to suggest?

Thanks

Ciro Chiappini
UT-Austin/UT-Health Science Center Houston
Biomedical Engineering Department
Dr. Mauro Ferrari Nanomedicine Lab