[mems-talk] Solution to clean ITO and SiO2

[Ning Wu (nwu at Princeton.EDU)]

Hi, 

I am wondering what kind of solution I can use to clean an ITO glass with some silicon oxide patterns on it.  I thought base would generally etch SiO2, while acid would etch ITO.  Am I correct?  So what can I use?  I need some real "cleaning" (slight etch, say a few nanometer is fine with me) rather than rinsing with orgnaic solvent, like acetone etc.  

Greatly appreciate any suggestions. 

Thanks. 

Ning Wu
The Department of Chemical Engineering
Princeton University
New Jersey 08544