[mems-talk] Tungsten 'W' etch

[shimul saha]

Hello, 

Thanks for your suggestion. We have tried with H2O2 to etch tungsten, but it looks the solution attacks the resist (HiPR 6517) much quicker than 'W'. Can you please suggest any Resist ( which can sustain enogh time) or methods to etch effciently tungsten. Any advice will be greatly helpful.

Thanking you.

Best regards,
Shimul Chandra Saha 
IET/NTNU
7491 Trondheim, Norway.

----- Original Message ---- 
From: Anil Agiral <aagiral at gmail.com> 
To: General MEMS discussion <mems-talk at memsnet.org> 
Sent: Friday, March 30, 2007 4:24:41 PM 
Subject: Re: [mems-talk] Tungsten 'W' etch 


Hello, 

You can try H2O2 which is used to etch TiW. It should work well with W 
etching also.