[mems-talk] About Image reversal

saravan kallempudi saravan_ece03 at yahoo.com
Tue Apr 17 10:40:35 EDT 2007


Hello,

I am trying to do Liftoff using AZ 5214 E before liftoff  and after baking if I measured the thickness of the PR, I noticed that there is about 1 micron change less than what it should be.
I want around 2 micron thick PR @2000 rpm but I am getting around 0.8 to 0.9 micron. For this reason I think I am unable to do liftoff.
Can anyone help me with this.

Thanks in advance
Saravan


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