[mems-talk] Al oxide

Hongzhi CHEN cfzsg at yahoo.com
Wed Apr 18 11:29:18 EDT 2007


Hello,

I am trying to use the native Aluminium oxide as the
insuloator, since if we expose the it in the air, Al
will oxidize itself to form severl nm aluminium oxide.
But when I expose that to the air to about 2 days, it
does not work. 

Is there any special treatment should be done, or just
leave it to the air? Or is there any way can
accelerate the oxidation?

Thank you for any advice.

Chen


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