[mems-talk] Removal of HMDS Prime

Roger Shile rshile at NANOINK.net
Wed Apr 18 13:22:01 EDT 2007


It's my understanding that a piranha clean will remove all effects of an
HMDS vapor prime on SiO2.  Is this true?  We have been experiencing
photoresist adhesion failure.  The question arose as to whether we might
be over-priming the wafers after stripping resist in piranha and
re-priming. 

Roger Shile


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