[mems-talk] Controlling evaporated metal roughness

henson at bu.edu henson at bu.edu
Thu Apr 19 10:55:38 EDT 2007


We'd like to deposit ~50nm Al layers with controlled surface 
roughnesses ranging from ~5nm Rms to above 10nm Rms. I'm using a Sharon 
e-beam evaporator system for the deposition but also have access to an 
Edwards Thermal evaporator. The greater Rms roughness the better. Any 
ideas?
Thanks,
John Henson
Boston University



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