[mems-talk] Re: Al oxide

Ning Wu (nwu at Princeton.EDU) nwu at Princeton.EDU
Thu Apr 19 18:51:21 EDT 2007


Hongzhi, 

I believe that native Aluminium oxide layer is very thin, just like native silicon oxide, which may not be thick enough to be used as a insulating layer. 

Ning 
  


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