[mems-talk] SOG etchant compatible to Al2O3

Dong Cai cd072801 at yahoo.com
Mon Apr 23 21:32:03 EDT 2007

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Hi,
   
  Anybody know how to chemically remove spin-on-glass without damaging Al2O3 film? Please suggest recipe and procedures.
   
  Thanks,
   
  Dong Cai
  Boston College

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