[mems-talk] Etching of lead-magnesium-niobium-lead titanate (PMN-PT film)

Rachel Tan nano_mems at yahoo.com
Mon Apr 23 23:02:04 EDT 2007


  Hi,
   
  Has anyone worked with the etching (either dry or wet) of lead-magnesium-niobium-lead titanate (PMN-PT) single crystal films? Is there any etching process available to thin down a layer of PMNPT material?
   
  Thanks for the help!
   
  Rachel


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