[mems-talk] Silicon stiffness matrix

Andrea Mazzolari mazzolari at fe.infn.it
Tue Apr 24 12:09:34 EDT 2007


Hi all,
i'm looking for stiffness matrix of silicon wafers (110) and (111). I've
found  stiffness matrix for (100) silicon, but it is quite tedious to
calculate stiffness matrix in (110) and (111) systems. Any idea where to
find those stiffness matrix ?

Best regards,
Andrea


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